Application Of Automotive MEMS Sensors

The full name of MEMS is Micro Electromechanical System, which is a micro device or system that integrates sensors, actuators, mechanical mechanisms, signal processing, and control circuits using semiconductor manufacturing processes and materials. Its internal structure is generally at the micrometer or even nanometer level. Compared with traditional mechanical sensors, MEMS sensors have advantages such as small size, integration, intelligence, and low cost, which can meet the requirements of the Internet of Things era for sensors.

MEMS is a revolutionary new technology widely used in high-tech industries, and is a key technology related to national scientific and technological development, economic prosperity, and national defense security. Common products include MEMS accelerometers, MEMS microphones, micro motors, micro pumps, micro oscillators, MEMS pressure sensors, MEMS gyroscopes, MEMS humidity sensors, and their integrated products.

The automotive electronics industry is considered to be the driving force behind the first wave of application of MEMS sensors. The rapid development of MEMS sensors in automotive applications is mainly due to the comprehensive introduction of automotive safety regulations and the development trend of automotive intelligence by governments around the world. The global average contains 10 sensors per car, and in high-end cars, approximately 25 to 40 MEMS sensors are used. The better the car, the more MEMS sensors are used. MEMS sensors not only adapt to the harsh working environment of automobiles, but also have the characteristics of high reliability, high precision, and low cost. Its application direction and market demand include anti lock braking system (ABS), electronic body stability program (ESP), electronic suspension (ECS), electric handbrake (EPB), hill start assist (HAS), tire pressure monitoring (EPMS), engine stabilization, vehicle inclination measurement, and in car heartbeat detection, among others. At present, pressure sensors, accelerometers, flow sensors, and gyroscopes together account for 99% of automotive MEMS systems.